2024.10.17
Koichi Endo, a visiting researcher at the Shinji Yokogawa Laboratory
at the i-Power Energy Systems Research Center, and Professor Shinji
Yokogawa received the Best Poster Award at the 33rd Asian Session of
the Advanced Metallization Conference (ADMETA) 2024, held at the
Takeda Hall of the University of Tokyo from Thursday, October 3rd to
Friday, October 4th, 2024.
ADMETA is an international conference where industry and academic
researchers gather to discuss materials, processes, devices, circuit
design, packaging, equipment, characterization, etc. related to the
back-end-of-line (BEoL) of advanced logic and memory semiconductor
devices.
This award was given to the presentation judged to be the most
outstanding at the poster session of the 32nd Asian Session of the
Advanced Metallization Conference (ADMETA) 2023. This is a detailed
investigation of the effects of lithography and chemical mechanical
polishing variation and initial failure screening on device
reliability, using simulations that reflect both lifetime distribution
models and physical models of dielectric breakdown, with regard to the
time-dependent dielectric breakdown (TDDB) phenomenon of low-k
dielectrics for reducing the parasitic capacitance between
interconnect.
Awardees: Koichi Endo, Shinji Yokogawa
Presentation title: Effects of defect clustering on the shape of TDDB
lifetime distribution and screening effectiveness
